cvd sic electrode for plasma etching

...CVD Silicon Carbide (SiC) Electrode is a high-performance semiconductor chamber component engineered for plasma etching, PECVD, ICP, and advanced wafer processing systems. Manufactured from high-purity Chemical Vapor Deposition (CVD) Silicon Carbide, the electrode delivers exceptional plasma...

...CVD SiC components are key consumable and structural parts used in semiconductor front-end equipment. They are widely applied in Dry Etch, EPI, Diffusion, and RTP processes. With excellent high purity, thermal conductivity, plasma corrosion resistance, high-temperature stability, low particle generation, and precision machinability, CVD SiC...