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| Categories | SiC Substrate |
|---|---|
| Brand Name: | ZMSH |
| Model Number: | SiC 6H-P |
| Certification: | rohs |
| Place of Origin: | CHINA |
| Price: | by case |
| Payment Terms: | T/T |
| Supply Ability: | 1000pc/month |
| Polytype: | 6H-P |
| Mohs Hardness: | ≈9.2 |
| Density: | 3.0 g/cm3 |
| Resistivity: | ≤0.1 Ω.cm |
| Surface Orientation: | on axis 0° |
| Roughness: | Polish Ra≤1 nm |
| Packaging: | Multi-wafer Cassette or Single Wafer Container |
| Application: | Microwave amplifier, antenna |
| Company Info. |
| SHANGHAI FAMOUS TRADE CO.,LTD |
| Verified Supplier |
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6H-P type silicon carbide substrate is a semiconductor material
grown by a special process. Its crystal structure is 6H type,
indicating that its cells have hexagonal symmetry, and each cell
contains a stacking sequence of six silicon atoms and six carbon
atoms. P-type indicates that the substrate has been doped so that
its conductivity is dominated by holes. An axis of 0° refers to the
fact that the crystal orientation of the substrate is 0° in a
specific direction (such as the C-axis of the crystal), which is
usually related to the growth and processing of the crystal.

4 inch diameter Silicon Carbide (SiC) Substrate Specification
| 等级Grade | 精选级(Z 级) Zero MPD Production Grade (Z Grade) | 工业级(P 级) Standard Production Grade (P Grade) | 测试级(D 级) Dummy Grade (D Grade) | ||
| 直径 Diameter | 99.5 mm~100.0 mm | ||||
| 厚度 Thickness | 350 μm ± 25 μm | ||||
| 晶片方向 Wafer Orientation | Off axis: 2.0°-4.0°toward [1120] ± 0.5° for 4H/6H- | ||||
| 微管密度 ※ Micropipe Density | 0 cm-2 | ||||
| 电 阻 率 ※ Resistivity | p-type 4H/6H-P | ≤0.1 Ωꞏcm | ≤0.3 Ωꞏcm | ||
| n-type 3C-N | ≤0.8 mΩꞏcm | ≤1 m Ωꞏcm | |||
| 主定位边方向 Primary Flat Orientation | 4H/6H-P | - {1010} ± 5.0° | |||
| 3C-N | - {110} ± 5.0° | ||||
| 主定位边长度 Primary Flat Length | 32.5 mm ± 2.0 mm | ||||
| 次定位边长度 Secondary Flat Length | 18.0 mm ± 2.0 mm | ||||
| 次定位边方向 Secondary Flat Orientation | Silicon face up: 90° CW. from Prime flat ± 5.0° | ||||
| 边缘去除 Edge Exclusion | 3 mm | 6 mm | |||
| 局部厚度变化/总厚度变化/弯曲度/翘曲度 LTV/TTV/Bow /Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm | |||
| 表面粗糙度 ※ Roughness | Polish Ra≤1 nm | ||||
| CMP Ra≤0.2 nm | Ra≤0.5 nm | ||||
| 边缘裂纹(强光灯观测) Edge Cracks By High Intensity Light | None | Cumulative length ≤ 10 mm, single length≤2 mm | |||
| 六方空洞(强光灯测) ※ Hex Plates By High Intensity Light | Cumulative area ≤0.05% | Cumulative area ≤0.1% | |||
| 多型(强光灯观测) ※ Polytype Areas By High Intensity Light | None | Cumulative area≤3% | |||
| 目测包裹物(日光灯观测) Visual Carbon Inclusions | Cumulative area ≤0.05% | Cumulative area ≤3% | |||
| 硅面划痕(强光灯观测) # Silicon Surface Scratches By High Intensity Light | None | Cumulative length≤1×wafer diameter | |||
| 崩边(强光灯观测) Edge Chips High By Intensity Light | None permitted ≥0.2mm width and depth | 5 allowed, ≤1 mm each | |||
| 硅面污染物(强光灯观测) Silicon Surface Contamination By High Intensity | None | ||||
| 包装 Packaging | Multi-wafer Cassette or Single Wafer Container | ||||
Notes:
※Defects limits apply to entire wafer surface except for the edge exclusion area. # The scratches should be checked on Si face only.

1. Q: Compared with type 4H, what are the differences in performance between type 6H-P SIC substrate axis 0°?
A: 6H type silicon carbide compared to 4H type, the crystal structure is different, which may lead to differences in electrical properties, thermal properties and mechanical strength. The 6H-P type axis of 0° generally has more stable electrical properties and higher thermal conductivity, suitable for specific high-temperature, high-frequency applications.
2. Q: What is the difference between 4H and 6H SiC?
A: The main difference between 4H and 6H silicon carbide is their crystal structure, 4H is a tetragonal hexagonal mixed crystal, and 6H is a pure hexagonal crystal.
Tag: #Sic wafer, #silicon carbide substrate, #Sic 6H-P type, #on
axis 0°, #Mohs Hardness 9.2
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