| Sign In | Join Free | My entremaqueros.com |
|
| Sign In | Join Free | My entremaqueros.com |
|
| Categories | SiC Substrate |
|---|---|
| Brand Name: | ZMSH |
| Model Number: | SiC Mirror |
| Certification: | rohs |
| Place of Origin: | CHINA |
| MOQ: | 25 |
| Price: | by case |
| Payment Terms: | T/T |
| Delivery Time: | 2-4 weeks |
| Packaging Details: | package in 100-grade cleaning room |
| Primary Material: | Ultra-high-purity SiC |
| Density: | ~3.0 – 3.2 g/cm³ |
| Elastic Modulus: | >400 GPa |
| Mohs Hardness: | 9.5 |
| Surface Roughness (Ra, DSP): | ≤ 0.5 nm |
| Coefficient of Thermal Expansion: | ~4.5×10⁻⁶/℃ |
| Company Info. |
| SHANGHAI FAMOUS TRADE CO.,LTD |
| Verified Supplier |
| View Contact Details |
| Product List |
Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
A Small-Size Double-Side Polished Silicon Carbide (SiC) Mirror is a high-performance optical component manufactured from ultra-high-purity silicon carbide (SiC) ceramic through precision machining and double-side polishing (DSP) technology. Its core features include compact dimensions (typically ≤50mm in diameter or side length) and nanoscale surface finish on both sides, specifically designed for modern high-end optoelectronic systems with extreme requirements for size, weight, stability, and optical precision. Leveraging the inherent properties of silicon carbide—ultra-high hardness, high stiffness, low thermal expansion, high thermal conductivity, and exceptional chemical stability—it is produced via processes such as reaction sintering, chemical vapor deposition (CVD), or pressureless sintering. The implementation of double-side ultra-precision polishing (surface roughness Ra typically ≤0.5 nm) enables it to serve as a core component in many compact precision optical devices.
1. Ultra-Lightweight & Miniaturization:
2. Superior Stability & Environmental Resistance:
3. Excellent Thermal Management:
4. Top-Tier Optical Surface Quality:
5. Outstanding Durability & Chemical Inertness:
Small-size double-side polished SiC mirrors are critically used in
the following high-end fields due to their unique advantages:
AR/MR Glasses Optical Systems:
As diffractive waveguide lenses, prisms, or reflectors for guiding and displaying light paths. Their high refractive index (~2.65), lightweight, and small size are key to achieving slim glasses design, large field of view (FOV), and elimination of rainbow patterns.
As reflectors or lens substrates in the illumination systems of lithography machines or sensors of wafer inspection equipment. Their high thermal stability and flatness are crucial for maintaining nanoscale overlay accuracy and inspection precision.
Used in laser galvanometers, laser interferometers, or as reflectors/window mirrors in high-power lasers. Their high damage threshold, high thermal conductivity, and stability ensure precise laser beam steering and long-term stable system operation.
As substrate materials for MEMS micromirrors or substrates for micro-optical devices, applied in LiDAR, projectors, etc., meeting stringent requirements for high-frequency response, high stability, and miniaturization.
| Parameter Category | Parameter Name | Typical Value/Range |
| Material Characteristics | Primary Material | Ultra-high-purity SiC |
| Density | ~3.0 – 3.2 g/cm³ | |
| Elastic Modulus | >400 GPa | |
| Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ | |
| Thermal Conductivity | ~120 – 200 W/(m·K) | |
| Mohs Hardness | 9.5 | |
| Optical & Surface Properties | Surface Roughness (Ra, DSP) | ≤ 0.5 nm |
| Surface Figure Accuracy (PV/RMS) | Up to λ/10 @ 632.8nm or better | |
| Dimensional Characteristics | Common Size Range | Diameter or side length 20–50mm |
| Functional Characteristics | Operating Temperature | -50℃ to 500℃ (or higher, process-dependent) |
2. SiC Ceramic Vacuum Chuck Flip-Chip Bonding Mirror Polishing High-Stiffness
1. Q: How do SiC mirrors work in optics?
A: SiC mirrors function by leveraging silicon carbide's extremely low thermal expansion coefficient (~4.5×10⁻⁶/℃), high thermal conductivity (~120–200 W/m·K), and high stiffness (>400 GPa) to maintain nanoscale surface stability under extreme temperatures and mechanical stress, ensuring minimal distortion in high-precision optical systems like space telescopes or EUV lithography equipment.
2. Q: How does a silicon carbide (SiC) mirror perform in extreme
environments?
A: Silicon carbide (SiC) mirrors excel in extreme environments due to their extremely low coefficient of thermal expansion and exceptional thermal stability. For instance, in space applications, they operate reliably across a temperature range from -60°C to 180°C. In automotive LiDAR systems, where engine compartment temperatures can exceed 125°C, SiC mirrors maintain minimal surface deformation. Additionally, their high hardness (Mohs hardness of 9.5) and superior chemical inertness enable effective resistance to vibration, impact, and corrosion from acids or alkalis, ensuring long-term stability under harsh conditions.
Tags: #SiC Mirror, #Customized, #Double-Side Polished,
#High-Purity, #Optical Component, #Corrosion-Resistant,
#High-Temperature Rated, #MEMS Micromirror
|
High Purity un-doped Silicon Carbide sic Wafer , 6Inch 4H-Semi Sic Silicon Carbide Substrate
Undoped transparent silicon carbide sic crystal Optical Lens with hardness 9.2
2 Inch 6H - Semi Silicon Carbide Wafer Low Power Consumption For Detector
2inch 3inch Dia100m 4H-N Type Silicon Carbide Wafer Production Grade For Semiconductor Device
dummy production Research Grade Silicon Carbide high purity 4h-semi un-doped transparent sic Wafer
Customized Size Square Sic Chip Low Lattice Mismatch With High Thermal
3 Inch Silicon Carbide Wafer , Sic Substrate Excellent Transient Characteristics
Semi - Insulating Silicon Carbide Substrate , Sic Wafer 4H High Purity
4H-SEMI Polished Sic Wafer lens 2INCH 3INCH 4INCH 9.0 Hardness For Device Material
HPSI SiC Wafer 2-12 Inch Optical Grade for AI/AR Glasses
